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The  [course_title] course teaches the basic concepts needed by engineers working in the field of microelectromechanical systems (MEMS). You will learn how microsystem design works along with the topics material properties, microfabrication technologies, structural behaviour, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. You will be assigned to design microsystems (sensors, actuators, and sensing/control systems) of a variety of types such as optical MEMS, bioMEMS, inertial sensors. The course illustrates Power MEMS, Optical MEMS, BioMEMS through case studies. By using a realistic microfabrication process, you will be able to design microsystem to meet a set of performance specifications (e.g., sensitivity, signal-to-noise). Practical emphasis will be given to modelling and simulation in the design process. However, you need to have basic knowledge about fabrication.


This course does not involve any written exams. Students need to answer 5 assignment questions to complete the course, the answers will be in the form of written work in pdf or word. Students can write the answers in their own time. Each answer needs to be 200 words (1 Page). Once the answers are submitted, the tutor will check and assess the work.


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Course Credit: MIT

Course Curriculum

lecture01 Introduction to MEMS 02:30:00
lecture02 Microfabrication for MEMS part II 02:30:00
lecture03 Microfabrication for MEMS part III 03:20:00
lecture04 Microfabrication for MEMS part IV; in-class fab problem 00:05:00
lecture05 Fabrication for the life sciences; material properties 03:20:00
lecture06 Elasticity 03:00:00
lecture07 Structures 01:20:00
lecture08 Lumped-element modeling 01:40:00
Lecture09 Energy-conserving transducers 02:20:00
lecture10 Dynamics, especially nonlinear 02:30:00
lecture11 Structures special topics 02:30:00
lecture12 Thermal energy domain; dissipation 02:00:00
Lecture13 Modeling dissipative processes 02:30:00
lecture14 Fluids 1 01:40:00
lecture15 Fluids 2 02:00:00
lecture16 Mass transport in liquids 02:10:00
lecture17 Feedback 01:40:00
lecture18 Noise 02:10:00
lecture19 Packaging 02:10:00
lecture20 In-class design problem 00:10:00
lecture21 Design tradeoffs 02:05:00
lecture22 Power MEMS case study 02:30:00
lecture23 Optical MEMS case study 02:00:00
lecture24 Capacitive accelerometer case study 02:30:00
lecture25 BioMEMS case study 02:20:00
Submit Your Assignment 00:00:00
Certification 00:00:00

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