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The [course_title] course teaches the basic concepts needed by engineers working in the field of microelectromechanical systems (MEMS). You will learn how microsystem design works along with the topics material properties, microfabrication technologies, structural behaviour, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. You will be assigned to design microsystems (sensors, actuators, and sensing/control systems) of a variety of types such as optical MEMS, bioMEMS, inertial sensors. The course illustrates Power MEMS, Optical MEMS, BioMEMS through case studies. By using a realistic microfabrication process, you will be able to design microsystem to meet a set of performance specifications (e.g., sensitivity, signal-to-noise). Practical emphasis will be given to modelling and simulation in the design process. However, you need to have basic knowledge about fabrication.
Assessment
This course does not involve any written exams. Students need to answer 5 assignment questions to complete the course, the answers will be in the form of written work in pdf or word. Students can write the answers in their own time. Each answer needs to be 200 words (1 Page). Once the answers are submitted, the tutor will check and assess the work.
Certification
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Course Credit: MIT
Course Curriculum
| lecture01 Introduction to MEMS | 02:30:00 | ||
| lecture02 Microfabrication for MEMS part II | 02:30:00 | ||
| lecture03 Microfabrication for MEMS part III | 03:20:00 | ||
| lecture04 Microfabrication for MEMS part IV; in-class fab problem | 00:05:00 | ||
| lecture05 Fabrication for the life sciences; material properties | 03:20:00 | ||
| lecture06 Elasticity | 03:00:00 | ||
| lecture07 Structures | 01:20:00 | ||
| lecture08 Lumped-element modeling | 01:40:00 | ||
| Lecture09 Energy-conserving transducers | 02:20:00 | ||
| lecture10 Dynamics, especially nonlinear | 02:30:00 | ||
| lecture11 Structures special topics | 02:30:00 | ||
| lecture12 Thermal energy domain; dissipation | 02:00:00 | ||
| Lecture13 Modeling dissipative processes | 02:30:00 | ||
| lecture14 Fluids 1 | 01:40:00 | ||
| lecture15 Fluids 2 | 02:00:00 | ||
| lecture16 Mass transport in liquids | 02:10:00 | ||
| lecture17 Feedback | 01:40:00 | ||
| lecture18 Noise | 02:10:00 | ||
| lecture19 Packaging | 02:10:00 | ||
| lecture20 In-class design problem | 00:10:00 | ||
| lecture21 Design tradeoffs | 02:05:00 | ||
| lecture22 Power MEMS case study | 02:30:00 | ||
| lecture23 Optical MEMS case study | 02:00:00 | ||
| lecture24 Capacitive accelerometer case study | 02:30:00 | ||
| lecture25 BioMEMS case study | 02:20:00 | ||
| Assessment | |||
| Submit Your Assignment | 00:00:00 | ||
| Certification | 00:00:00 | ||
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